・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Other Data :
> Safety Instructions
> Auto Switches Common Specifications
> Green Procurement (RoHS)
■Aluminum bodied
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
■Possible to replace the bellows
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
■A model with a solenoid valve has been added. New
■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator
■Heater is available for option.
For 100/120° C
■Auto switches are mountable from 4 directions.
■High Vacuum Angle Valve Series Variations
