Parallel Seal Type Slit Valve XGTP – For 300 mm Wafer

Description

・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
　(compared with the existing product)
・Easier maintenance
　Easy replacement of bellows
　Gate can be replaced from above. (Made to order)
・Safety measures
　A mechanical end lock mechanism has been adopted.

Other Data :
> Safety Instructions
> System Configuration/Series Variations
> Green Procurement (RoHS)

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Technical Data

Features

■Long service life 3 million cycles (at ordinary temperature)
Low particle generation Reduced by 1/5 or more

■Low particle generation and longer service life through the use of
a parallel sealing motion

The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.

■Easier maintenance

Easy replacement of bellows

Gate can be replaced from above.(Made to order)

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