・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
A mechanical end lock mechanism has been adopted.
■Low particle generation and longer service life through the use of
a parallel sealing motion
The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.