・In addition to the state-of-the-art functions of the HRZ series,
these models employ a DC inverter compressor to achieve better energy
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Other Data :
> Safety Instructions
> Temperature Control Equipment/Precautions
> Features/Series Variations
> Technical Data
> Temperature Control Equipment Warranty
> Green Procurement (RoHS)