・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Other Data :
> Safety Instructions
> Temperature Control Equipment/Precautions
> Features/Series Variations
> Technical Data
> Temperature Control Equipment Warranty
> Green Procurement (RoHS)