Thermo-chiller/High-performance Type HRZ


・Suitable for semiconductor processing equipment with a wide variety of features,
 such as high-temperature stability, a wide temperature range, failure diagnosis,
 external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking

∗ The HRZ series will be discontinued in December 2022.
 Please select the HRZ-F series.

Other Data :
> Safety Instructions
> Temperature Control Equipment/Precautions
> Features/Series Variations
> Technical Data
> Temperature Control Equipment Warranty
> Green Procurement (RoHS)

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Technical Data