Description

・The valve/needle valve-integrated construction requires only 1/4 the piping
　space of previous models.
・Particle numbers have been significantly reduced through the use of a metal
　diaphragm in the sheet portion.
・Flow of both the initial air supply and the main air supply can be adjusted.

Other Data :
> Safety Instructions
> System Configuration/Series Variations
> Green Procurement (RoHS)

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