Diaphragm Valve for Ultra High Purity AZ


・Cleaned for high purity semiconductor applications and clean room assembled
・Helium leak tested
・SEMI Standards compliant
・User-friendly forged body

Other Data :
> Safety Instructions
> Process Gas Equipment/Common Precautions
> Series Variations
> Valve and Regulator Recommendations
> Technical Data/Glossary of Terms

> Green Procurement (RoHS)

Product Number Check

Download Catalogs

Technical Data