・High fluorine resistance
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
■Possible to replace the bellows
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New
・Ambient temperature: Max. 150° C (Sensor)