Description

・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not
　required.
・Suitable for semiconductor processing equipment with a wide variety of features,
　such as high-temperature stability, a wide temperature range, failure diagnosis,
　external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.

Other Data :
> Safety Instructions
> Temperature Control Equipment/Precautions
> Features/Series Variations
> Technical Data
> Temperature Control Equipment Warranty
> Green Procurement (RoHS)

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