・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter
refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping
・Compliant with SEMI Standards, CE-marking
Other Data :
> Safety Instructions
> Temperature Control Equipment/Precautions
> Features/Series Variations
> Technical Data
> Temperature Control Equipment Warranty
> Green Procurement (RoHS)