・Modularized clean equipment (Reduced piping labor/Space saving)
Makes clean air easily available
・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
・Wetted parts: Grease-free, Silicone-free
・Assembled in a clean room, Shipped and packed in double packaging
・24 combinations are available.
Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1