Check Valve/Vacuum Generator/Flow Switch AP

Description

[Check valve]
・Fluid backflow is prevented by back pressure.
・Unique design with only one moving part in the gas stream, an O-ring
・Springless structure suppresses particle generation by vibration or
　chattering and pressure fluctuations on the downstream side

[Vacuum generator]
・Vacuum generation equipment
・Applicable to the exhaustion of unnecessary gas remaining inside the
　piping during gas cylinder replacement

[Flow switch]
・Detects excess flow above a given flow rate caused by pipe breakage, etc.

Other Data :
> Safety Instructions
> Process Gas Equipment/Common Precautions
> Series Variations
> Valve and Regulator Recommendations
> Technical Data/Glossary of Terms
> Green Procurement (RoHS)

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Technical Data

Features

■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
  • For UHP gas delivery in semiconductor and other clean industries.
  • Body material: 316L SS secondary remelt or 316L SS
  • Electropolished wetted parts
  • Metal seal to atmosphere

■Regulator/Back Pressure Regulator for General Applications Series AK/BP

  • For wide variety of applications from semiconductor to general.
  • Body material 316 SS or brass available depending on gas.

■Diaphragm Valve for Ultra High Purity Series AP

  • For UHP gas delivery in semiconductor and other clean industries.
  • Used as gas shutoff valve.
  • No spring is used for the wetted parts and drive part is also separated
    from the diaphragm. Dead space in the flow path is small to suppress
    the particle generation.

■Check Valve/Vacuum Generator/Flow Switch Series AP

[Check valve]

  • Fluid back-flow is prevented by back pressure.
  • Unique design with only one moving part in the gas stream, an O-ring.
  • Springless structure suppresses particle generation by vibration or
    chattering or pressure fluctuation on downstream side.

[Vacuum generator]

  • Vacuum generation equipment.
  • Applicable to emission of unnecessary gas remaining inside the
    piping during gas cylinder replacement.

[Flow switch]

  • Detects excess flow above a given flow rate, caused by pipe breakage, etc.

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