・The transportation, pushing, and length measurement systems have been
miniaturized through the use of a linear motor.
・Thickness 9 mm, Weight 130 g (At a stroke of 10 mm)
・Linear motor type: Moving magnet type linear motor
・Max. pushing force: 6 N
・Positioning repeatability: ±5 μm
・Pushing measurement accuracy: ±10 μm
・Max. operating frequency: 500 cpm